Microelectromechanical System

Microelectromechanical Systems (MEMS), mechanical components, and electronic circuits combine to form miniature devices, typically tens of micrometers to hundreds of micrometers (millionths of a meter) in size, on a semiconductor chip. Typical applications for MEMS include sensors, actuators, and process control devices. Interest in MEMS creation increased in the 1980s, but it took nearly 20 […]